Product Type:
Equipment
Application:
Deposition
Product Description:
Atomic Shell
Nano-Powder Coating ALD with reactor volume up to 500cc and process temperatures up to 300°C. Excellent conformality complex 3D nano- & micro-structures.
Nano-Powder Coating ALD Process
For shell coating on core structure
- Reactor Volume : 100 cc ~ 500 cc
- Filter Size : Variable (0.5 µm~ )
- Reactor Heating : Max 300 ℃ (Reactor Body : more than 230 ℃)
- Reactor rotation : DC Motor Driver
- Rotation speed : 10 ~ 60 rpm
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