{"id":10799,"date":"2023-05-22T13:58:44","date_gmt":"2023-05-22T11:58:44","guid":{"rendered":"https:\/\/s3-alliance.com\/?p=10799"},"modified":"2023-06-14T12:00:18","modified_gmt":"2023-06-14T10:00:18","slug":"wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology","status":"publish","type":"post","link":"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/","title":{"rendered":"Wafer Ashing System from ESI at EPFL, Swiss Federal Institute of Technology"},"content":{"rendered":"

Installation of an e3511 Wafer Ashing System at EPFL, Swiss Federal Institute of Technology<\/h2>\n

\"Gasonics<\/p>\n

<\/h2>\n

Last year, S3 Alliance installed an e3511 Wafer Ashing System from ESI at EPFL, Swiss Federal Institute of Technology<\/a><\/strong>. One of Europe’s most vibrant and cosmopolitan science and technology institutions.<\/p>\n

The tool was installed inside the Center of MicroNanoTechnology (CMi), a complex of cleanrooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnology.<\/p>\n

Mr. Pernollet, process engineer at CMi, stated:
\n<\/strong>„S3 Alliance installed this tool as complementary to our regular barrel type ashers. Hardware of the e3511 offers us higher rate of resist removal and improved uniformity across wafers<\/strong> <\/a>which is a real plus for descum processes. The quick and easy handling<\/strong><\/a> allows for fast training of our users and the tool proves to be versatile and robust which is a must-have<\/strong><\/a> characteristic for our users-based platform!“<\/p>\n

 <\/p>\n

See the technical information about e3511<\/a><\/strong><\/p>\n

or brows all our products of ESI<\/a><\/strong><\/p>\n

ESI, with a focus on serving the semiconductor industry and Gasonic Asher Equipment<\/strong><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

Installation of an e3511 Wafer Ashing System at EPFL, Swiss Federal Institute of Technology Last year, S3 Alliance installed an e3511 Wafer Ashing System from ESI at EPFL, Swiss Federal Institute of Technology. One of Europe’s most vibrant and cosmopolitan science and technology institutions. The tool was installed inside the Center of MicroNanoTechnology (CMi), a… Read more »<\/a><\/p>\n","protected":false},"author":9,"featured_media":10806,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-10799","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"acf":[],"yoast_head":"\nWafer Ashing System from ESI at EPFL, Swiss Federal Institute of Technology - S3 Alliance<\/title>\n<meta name=\"description\" content=\"Wafer Ashing System e3511 from ESI installed at a complex of cleanrooms and processing equipment for training and scientific experimentation\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Wafer Ashing System from ESI at EPFL, Swiss Federal Institute of Technology - S3 Alliance\" \/>\n<meta property=\"og:description\" content=\"Wafer Ashing System e3511 from ESI installed at a complex of cleanrooms and processing equipment for training and scientific experimentation\" \/>\n<meta property=\"og:url\" content=\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/\" \/>\n<meta property=\"og:site_name\" content=\"S3 Alliance\" \/>\n<meta property=\"article:published_time\" content=\"2023-05-22T11:58:44+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2023-06-14T10:00:18+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/dev.webdesign-le.de\/wp-content\/uploads\/2023\/05\/ESI_200x200px.png\" \/>\n\t<meta property=\"og:image:width\" content=\"200\" \/>\n\t<meta property=\"og:image:height\" content=\"200\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"author\" content=\"Stefanie Munding\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Verfasst von\" \/>\n\t<meta name=\"twitter:data1\" content=\"Stefanie Munding\" \/>\n\t<meta name=\"twitter:label2\" content=\"Gesch\u00e4tzte Lesezeit\" \/>\n\t<meta name=\"twitter:data2\" content=\"2\u00a0Minuten\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/\"},\"author\":{\"name\":\"Stefanie Munding\",\"@id\":\"https:\/\/dev.webdesign-le.de\/de\/#\/schema\/person\/5842e953e53ffad1a4103991576bac20\"},\"headline\":\"Wafer Ashing System from ESI at EPFL, Swiss Federal Institute of Technology\",\"datePublished\":\"2023-05-22T11:58:44+00:00\",\"dateModified\":\"2023-06-14T10:00:18+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/\"},\"wordCount\":187,\"publisher\":{\"@id\":\"https:\/\/dev.webdesign-le.de\/de\/#organization\"},\"image\":{\"@id\":\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/dev.webdesign-le.de\/wp-content\/uploads\/2023\/05\/ESI_200x200px.png\",\"articleSection\":[\"News\"],\"inLanguage\":\"de\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/\",\"url\":\"https:\/\/dev.webdesign-le.de\/de\/wafer-ashing-system-from-esi-at-epfl-swiss-federal-institute-of-technology\/\",\"name\":\"Wafer Ashing System from ESI at EPFL, Swiss Federal Institute of Technology - 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