ESI

ESI e3612 Single Wafer, Dual
Chamber, Dual Cassette
Dual Pick Robot, Dual cooling stations with
APT

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e3612 Plasmaveraschungsanlage für einzelne Wafer

Zwei Kammern mit 2 Kassettenstationen und Doppelarm-Roboter Asher.

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Gasonics e3511 Asher plasma Photoresist stripper

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Gasonics e3511 Plasma Asher

Gasonics e3511 Plasma Asher.

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ESI e3611 single wafer single chamber with Advanced Plasma Technology / e3612 Single Wafer, Dual Chamber, Dual Cassette Dual Pick Robot, Dual cooling stations with APT

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e3611 Single Wafer Plasma Ashing System

Single chamber with 2 cassette stations and single-arm robot Asher.

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Gasonics e3511 Asher plasma Photoresist stripper

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Gasonics L3510 Refurbishment und Upgrades

Gasonics L3510 Refurbishment und Upgrades.

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