Automation
CP150 Series High-Precision Automation Platform
Stand-Alone Automation Platform for Multiple Applications as Metrology, Inspection or Lamination
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Automation
We offer automated Wafer Handling Loader /Unloader as well as Automatic Batch Wafer Transfer Systems.
Automation
SIM Series Automation Platform
Modular, free combinable automation platform for complex production processes
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Automation
WaferMate300 Wafer Handling Automation Platform
EFEM with up to 4 300mm FOUP load ports for Semiconductor process tools
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Automation
WaferMate200 Wafer Handling Automation Platform
EFEM with up to 4 200mm open cassette or SMIF load ports for process automation
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