CMP, Wet Processing
Aquarius™ A200-sa Wafer Cleaner
Post CMP Scrubber with possible simultaneous scrubbing of 2 wafer sizes (up to 200mm), high Throughput.
INFO
Wet Processing
Wet Processing solutions including spin cleaning machines, immersion wet benches, water delivery systems and post CMP scrubbers.
Wet Processing
Inception – Single Wafer Processing Tool
Inception Single Wafer Processing Tool from Rena. Clean, Etch, Strip & Dry - Enabling the Transition...
INFO
Electroplating EPM 2
RENA's Electroplating EPM 2 is a compact electro-plating system for semiconductor device manufacturing and packaging applications.
INFO
Integrated IPA Drying
Genesis Marangoni Dryer
RENA's Genesis Marangoni Dryer integrates drying with cleaning and rinsing, providing a one-step process for several applications.
INFO
Integrated IPA Drying
VaporDry Integrated IPA Drying Process
MEI’s VaporDry, Integrated IPA Drying Process displaces water from high aspect ratio features and TSV, effectively drying the...
INFO
Wet Processing
YM-S1-M Wafer Spin Cleaning Machine
Manual Loading 3-12″ single wafer spin Cleaning machine
INFO
Wet Processing
NDS 412/408/406 Spin Cleaner (4" to 12")
Manuel Loading Automatic 4″-12″ single wafer spin cleaning system
INFO
Wet Processing
Compass SRD Spin Rinse Dryer
RENA NA Spin Rinse Dryer offers advanced Software Controls with high Quality Hardware (control of vibrations,...
INFO
Wet Processing
Revolution Immersion Wet Bench
Revolution Immersion Wet Bench for sale. Robust rotary robots can handle carriers up to 300mm wafers...
INFO
Wet Processing
Evolution Immersion Wet Bench
Evolution Immersion Wet Bench for sale. Full-Auto Wet Bench is an in-line, configurable, automated, modular, linear...
INFO
Wet Processing
Advancer Immersion Wet Bench
Advancer Immersion Wet Bench for sale. Flexible configurations that provide effective solutions to many wet processing...
INFO
Wet Processing
Chemical Delivery System
Chemical Delivery System for sale. MEI deliver 3 different Chemical Delivery Systems: FlexChem, MultiChem and DrumChem....
INFO
CMP, Wet Processing
OnTrak DSS-200 Synergy™ Post CMP Scrubber
Double-sided PVA Scrubber for 100mm to 200mm wafers.
INFO
CMP, Wet Processing
OnTrak DSS200 Series 2 Post CMP Scrubber
Double-sided PVA Scrubber for 100mm to 200mm wafers.
INFO
CMP, Wet Processing
OnTrak DSS-200 Series 1 Post CMP Scrubber
Double-sided PVA Scrubber for 100mm to 200mm wafers.
INFO