Equipment Others
Equipment in our portfolio that does not fit into the other structure.
Etching
e3611 Single Wafer Plasma Ashing System
Single chamber with 2 cassette stations and single-arm robot Asher.
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Etching
e3612 Single Wafer Plasma Ashing System
Two chamber with 2 cassette stations and dual-arm robot Asher.
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Equipment Others
DXB 880 Series Wafer Bonder
Temporary Wafer Bonder with 279mm diameter Chamber and active cooling chuck
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Equipment Others
DXB 120 Series Wafer Bonder
Temporary Wafer Bonder with 279mm diameter Chamber
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Equipment Others
DXB 525 Series Wafer Bonder
Temporary Wafer Bonder with 132mm diameter chamber
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Etching
Gasonics L3510 Remanufacturing Service and Upgrade...
Gasonics L3510 Remanufacturing Service and Upgrades.
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Etching
Atlas Stripper
The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical...
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Etching
Titan Loadlocked RIE with VCE
The Titan is a very compact, fully automated, vacuum loadlocked plasma system for semiconductor production. Available...
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Etching
Minilock - Phantom RIE
The Minilock – Phantom RIE is a Reactive Ion Etch system with a vacuum loadlock. The...
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Etching
Sirus T2 Table Top RIE
The Sirus T2 Reactive Ion Etcher is a basic plasma etching system designed to etch dielectrics...
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Etching
Gemini Multi-Chamber Stripper
The Gemini is a compact multi-chamber, high throughput stripping system that is designed specifically for the...
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Etching
Apollo Stripper
The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical...
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