Deposition
S3 Alliance offers advanced deposition tools for PECVD, ALD, and ultrasonic spray technology, tailored to your specific needs.
Benefit from our expertise, reliability, and innovative solutions for your deposition processes.

Deposition
Atomic Mega
Vertical Furnace Batch ALD for up to 12″ wafers (boat with up to 100wafers), up to...
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Deposition
Atomic Shell
Nano-powder coating ALD with 100cc to 500cc reactor volume, up to 300°C.
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Deposition
Atomic Premium
Showerhead Thermal ALD reactor for 4 to 12″ wafers, up to 500°C (Plasma Process available)
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Deposition
Spin Coater TOP-8
Compact Spin Coater for Samples and Wafer up to 8″. Simple Operation.
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Deposition
Spin Coater ACE-200
Compact Spin Coater for Samples and Wafer up to 6″. Simple Operation.
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Deposition
PRISM-1200 Ultrasonic Spray Coating System
The PRISM-1200 is a high-speed, high performance spray coating tool designed for the thin, uniform application...
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Deposition
PRISM-800 Ultrasonic Spray Coating System
PRISM-800 systems leverage USI’s proprietary nozzle-less ultrasonic technology which delivers a more precise coating application up...
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Deposition
PRISM-500 Ultrasonic Spray Coating System
Der PRISM-500 ist eine leistungsstarke X-Y-Z-Bewegungs- und Positionierungsplattform, die für das Aufbringen einer Vielzahl von Beschichtungen...
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Deposition
USI PV360 Ultrasonic Spray Coating System
The PV-360 is a high-volume, in-line spray doping system for the thin and uniform application of...
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Deposition
PRISM-400 BT (Benchtop) Ultrasonic Spray Coating S...
PRISM-400 Benchtop Ultraschall-Sprühbeschichtungssystem. X-Y-Z Sprühbeschichtungssystem with USI’s proprietary nozzle-less ultrasonic spray head, für den Labormaßstab und...
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Deposition
Orion PECVD
The Orion Plasma Enhanced Chemical Vapor Deposition System produces production-quality films on a compact platform. The...
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Deposition, Etching
Oracle Cluster CVD RIE System
The Oracle is the smallest and most flexible full production cluster system on the market. The...
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